Plasma enhanced atomic layer deposition of (nitrogen doped) Ti phosphate for improved energy storage in Li-ion batteries

Henderick, LowieLowieHenderickHamed, HamidHamidHamedMattelaer, FelixFelixMattelaerMinjauw, MatthiasMatthiasMinjauwMeersschaut, JohanJohanMeersschautDendooven, JolienJolienDendoovenSafari, MomoMomoSafariVereecken, PhilippePhilippeVereeckenDetavernier, ChristopheChristopheDetavernier2021-10-282021-10-2820201944-8244https://imec-publications.be/handle/20.500.12860/35261Plasma enhanced atomic layer deposition of (nitrogen doped) Ti phosphate for improved energy storage in Li-ion batteriesJournal articlehttps://doi.org/10.1021/acsami.0c05585