In situ UHVEM study of {113}-defect formation in Si nanowires

Vanhellemont, JanJanVanhellemontAnada, S.S.AnadaYasuda, H.H.YasudaVan Marcke, PatriciaPatriciaVan MarckeBender, HugoHugoBenderRooyackers, RitaRitaRooyackersVandooren, AnneAnneVandooren2021-10-232021-10-2320150268-1242https://imec-publications.be/handle/20.500.12860/26107In situ UHVEM study of {113}-defect formation in Si nanowiresJournal articlehttp://iopscience.iop.org/article/10.1088/0268-1242/30/11/114013/meta;jsessionid=D981C185B191F6BA224B7874A454D620.c3.iopscience.