Evaluating SiGe-on-Si epitaxial quality by inline surface light scattering: a case study on the impact of interfacial oxygen

Wostyn, KurtKurtWostynKenis, KarineKarineKenisRondas, DirkDirkRondasLoo, RogerRogerLooHikavyy, AndriyAndriyHikavyyDouhard, BastienBastienDouhardMertens, PaulPaulMertensHolsteyns, FrankFrankHolsteynsDe Gendt, StefanStefanDe GendtSimpson, GavinGavinSimpsonBast, GerhardGerhardBastSwaminathan, KarthikKarthikSwaminathan2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24834Evaluating SiGe-on-Si epitaxial quality by inline surface light scattering: a case study on the impact of interfacial oxygenProceedings paperhttp://ecst.ecsdl.org/content/64/6/989.short?related-urls=yes&legid=ecst;64/6/989