3D analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artefacts

Ke, XiaoxingXiaoxingKeBals, SarahSarahBalsCott, DaireDaireCottHantschel, ThomasThomasHantschelBender, HugoHugoBenderVan Tendeloo, GustaafGustaafVan Tendeloo2021-10-182021-10-1820101431-9276https://imec-publications.be/handle/20.500.12860/173573D analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artefactsJournal article