Depas, MichelMichelDepasCrossley, A.A.CrossleyVermeire, BertBertVermeireMertens, PaulPaulMertensSofield, C. J.C. J.SofieldHeyns, MarcMarcHeyns2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/619Microroughness of clean silicon surfaces and gate oxide breakdownMeeting abstract