80 nm tall thermally stable cost effective FinFETs for advanced dynamic random access memory periphery devices for artificial intelligence/machine learning and automotive applications

Spessot, AlessioAlessioSpessotRitzenthaler, RomainRomainRitzenthalerDentoni Litta, EugenioEugenioDentoni LittaDupuy, EmmanuelEmmanuelDupuyO'Sullivan, BarryBarryO'SullivanBastos, JoaoJoaoBastosCapogreco, ElenaElenaCapogrecoMiyaguchi, KenichiKenichiMiyaguchiMachkaoutsan, VladimirVladimirMachkaoutsanYoon, YounggwangYounggwangYoonFazan, PierrePierreFazanHoriguchi, NaotoNaotoHoriguchi2022-03-092022-03-0920210021-4922WOS:000632369500001https://imec-publications.be/handle/20.500.12860/3939080 nm tall thermally stable cost effective FinFETs for advanced dynamic random access memory periphery devices for artificial intelligence/machine learning and automotive applicationsJournal article10.35848/1347-4065/abebbfWOS:000632369500001