High-frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithography

Assouar, M.B.M.B.AssouarElmazria, O.O.ElmazriaKirsch, P.P.KirschAlnot, P.P.AlnotMortet, V.V.MortetTiusan, C.C.Tiusan2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11660High-frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithographyJournal article