Fabrication and characterization of SOI multi gate field effect transistors with high-k dielectrics and metal gates

Ferain, IsabelleIsabelleFerain2021-10-172021-10-172008-12https://imec-publications.be/handle/20.500.12860/13719Fabrication and characterization of SOI multi gate field effect transistors with high-k dielectrics and metal gatesPHD thesis