Density limits in logic metal1 using double patterning

Wiaux, VincentVincentWiauxVerhaegen, StafStafVerhaegenFenger, GermainGermainFengerWong, PatrickPatrickWong2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16538Density limits in logic metal1 using double patterningProceedings paper