Houssa, MichelMichelHoussaAoulaiche, MarcMarcAoulaicheVan Elshocht, SvenSvenVan ElshochtDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenHeyns, MarcMarcHeyns2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10613Impact of Hf content on negative bias temperature instabilities in HfSiON-based gate stacksJournal article