Impact of Cationic Stoichiometry on Physical, Optical and Electrical Properties of SrTiO3 Thin Films Grown on (001)-Oriented Si Substrates

Baryshnikova, MarinaMarinaBaryshnikovaBoelen, AndriesAndriesBoelenCeccon, LucaLucaCecconHerreman, VincentVincentHerremanMcMitchell, SeanSeanMcMitchellHaffner, ChristianChristianHaffnerMerckling, ClementClementMerckling2024-08-062024-05-112024-08-0620241996-1944WOS:001211367600001https://imec-publications.be/handle/20.500.12860/43926Impact of Cationic Stoichiometry on Physical, Optical and Electrical Properties of SrTiO3 Thin Films Grown on (001)-Oriented Si SubstratesJournal article10.3390/ma17081714WOS:001211367600001DIFFUSIONEPITAXYINTEGRATIONSILICONOXIDESMEDLINE:38673072