Wafer scale fabrication of miniature vacuum packages for MEMS/NEMS using thin membranes of nanoporous alumina

Zekry, JosephJosephZekrySabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanCelis, Jean-PierreJean-PierreCelisPuers, BobBobPuersVan Hoof, ChrisChrisVan HoofTilmans, HarrieHarrieTilmans2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21910Wafer scale fabrication of miniature vacuum packages for MEMS/NEMS using thin membranes of nanoporous aluminaOral presentation