Rezvanov, AskarAskarRezvanovZhang, LipingLipingZhangWatanabe, MitsuhiroMitsuhiroWatanabeHacker, NigelNigelHackerTokei, ZsoltZsoltTokeiBoemmels, JuergenJuergenBoemmelsArmini, SilviaSilviaArminide Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27209Pore surface grafting of porous low-k dielectrics by selective polymersMeeting abstract