Probing ultra thin Si passivation layers on Ge-substrates

Vandervorst, WilfriedWilfriedVandervorstDouhard, BastienBastienDouhardDelmotte, JorisJorisDelmotteFranquet, AlexisAlexisFranquetVincent, BenjaminBenjaminVincentCaymax, MattyMattyCaymax2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20013Probing ultra thin Si passivation layers on Ge-substratesOral presentation