Low-loss, low-temperature PVD SiN waveguides

Golshani, NeginNeginGolshaniWitters, ThomasThomasWittersMcGurk, JohnJohnMcGurkDe Heyn, PeterPeterDe HeynDe Coster, JeroenJeroenDe CosterMilenin, AlexeyAlexeyMileninThiam, ArameArameThiamMingardi, AndreaAndreaMingardiVerheyen, PeterPeterVerheyenPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan Campenhout2023-08-082023-06-202023-08-0820211949-2081WOS:000783824500027https://imec-publications.be/handle/20.500.12860/41846Low-loss, low-temperature PVD SiN waveguidesProceedings paper10.1109/GFP51802.2021.9673874978-1-6654-2224-6WOS:000783824500027