Mols, YvesYvesMolsBogdanowicz, JanuszJanuszBogdanowiczFavia, PaolaPaolaFaviaLagrain, PieterPieterLagrainGuo, WeimingWeimingGuoBender, HugoHugoBenderKunert, BernardetteBernardetteKunert2021-10-272021-10-2720190021-8979https://imec-publications.be/handle/20.500.12860/33615Structural analysis and resistivity measurements of InAs and GaSb fins on 300 mm Si for vertical (T)FETJournal articlehttps://doi.org/10.1063/1.5096015