Test structures and methodologies for assessments of back-end-of line (BEOL) reliability

Tokei, ZsoltZsoltTokeiBruynseraede, ChristopheChristopheBruynseraede2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11324Test structures and methodologies for assessments of back-end-of line (BEOL) reliabilityOral presentation