80nm tall thermally stable cost effective FinFETs for advanced DRAM periphery devices for AI/ML and Automotive applications

Spessot, AlessioAlessioSpessotRitzenthaler, RomainRomainRitzenthalerDentoni Litta, EugenioEugenioDentoni LittaDupuy, EmmanuelEmmanuelDupuyO'Sullivan, BarryBarryO'SullivanBastos, JoaoJoaoBastosCapogreco, ElenaElenaCapogrecoMiyaguchi, KenichiKenichiMiyaguchiMachkaoutsan, VladimirVladimirMachkaoutsanYoon, YounggwangYounggwangYoonFazan, PierrePierreFazanHoriguchi, NaotoNaotoHoriguchi2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/3600080nm tall thermally stable cost effective FinFETs for advanced DRAM periphery devices for AI/ML and Automotive applicationsProceedings paperhttps://confit.atlas.jp/guide/event/ssdm2020/subject/B-10-03/date