Strained Si on strain-relaxed SiGe buffer layers: the selective route towards integration

Caymax, MattyMattyCaymaxDelhougne, RomainRomainDelhougneLoo, RogerRogerLooEneman, GeertGeertEnemanVerheyen, PeterPeterVerheyen2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8664Strained Si on strain-relaxed SiGe buffer layers: the selective route towards integrationProceedings paper