Roussel, PhilippePhilippeRousselDegraeve, RobinRobinDegraeveKerber, AndreasAndreasKerberPantisano, LuigiLuigiPantisanoGroeseneken, GuidoGuidoGroeseneken2021-10-152021-10-152003-03https://imec-publications.be/handle/20.500.12860/8094Accurate reliability evaluation of non-uniform ultrathin and high-k layersProceedings paper