Transient pull-in simulation of electrostatic microvalve with physics-based contact function

Keulemans, GrimGrimKeulemansLiang, BoshenBoshenLiangPodkovskiy, AlexeyAlexeyPodkovskiyJambaldinni, ShrutiShrutiJambaldinniWysocka, DominikaDominikaWysockaZhang, LeiLeiZhangStakenborg, TimTimStakenborgCheyns, DavidDavidCheynsHeremans, PaulPaulHeremansRochus, VeroniqueVeroniqueRochus2022-06-242021-11-022022-05-312022-06-242021-04-26NoneWOS:000706452600017https://imec-publications.be/handle/20.500.12860/37435Transient pull-in simulation of electrostatic microvalve with physics-based contact functionProceedings paper10.1109/EuroSimE52062.2021.9410843978-1-6654-1373-2WOS:000706452600017