On the spatial resolution of scanning spreading resistance microscopy: experimental assessment and electro-mechanical modeling

Eyben, PierrePierreEybenDegryse, DominiekDominiekDegryseVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10445On the spatial resolution of scanning spreading resistance microscopy: experimental assessment and electro-mechanical modelingProceedings paper