Bergman, E. J.E. J.BergmanLagrange, SébastienSébastienLagrangeClaes, MartineMartineClaesDe Gendt, StefanStefanDe GendtRöhr, ErikaErikaRöhr2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5056Pre-diffusion cleaning using ozone and HFProceedings paper