Ion implantation in Ge and associated defect control

Satta, AlessandraAlessandraSattaSimoen, EddyEddySimoenJanssens, TomTomJanssensBenedetti, AlessandroAlessandroBenedettiClarysse, TrudoTrudoClarysseDe Jaeger, BriceBriceDe JaegerGeenen, LucLucGeenenBrijs, BertBertBrijsMeuris, MarcMarcMeurisVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162005-09https://imec-publications.be/handle/20.500.12860/11167Ion implantation in Ge and associated defect controlProceedings paper