Roelkens, GuntherGuntherRoelkensBogaerts, WimWimBogaertsTaillaert, DirkDirkTaillaertDumon, PieterPieterDumonLiu, LiuLiuLiuSelvaraja, ShankarShankarSelvarajaVan Campenhout, J.J.Van CampenhoutDe Vos, KatrienKatrienDe VosDebackere, PeterPeterDebackereVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-172021-10-172008-08https://imec-publications.be/handle/20.500.12860/14372Silicon nanophotonics: towards VLSI photonic integrated circuitsProceedings paper