Extreme-Ultraviolet-Lithography Line-Space Patterning Defect Detection Using Voltage Contrast SEM

Hasan, MahmudulMahmudulHasanDey, BappadityaBappadityaDeyBlanco, VictorVictorBlancoBeral, ChristopheChristopheBeralCharley, Anne-LaureAnne-LaureCharley2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300021https://imec-publications.be/handle/20.500.12860/45959Extreme-Ultraviolet-Lithography Line-Space Patterning Defect Detection Using Voltage Contrast SEMProceedings paper10.1117/12.3049337978-1-5106-8639-7WOS:001514426300021