Temperature induced microstructural changes and deformation of metal alloys used for RF-MEMS switches

Modlinski, RobertRobertModlinskiPuers, BobBobPuersDe Wolf, IngridIngridDe Wolf2021-10-162021-10-162005-09https://imec-publications.be/handle/20.500.12860/10893Temperature induced microstructural changes and deformation of metal alloys used for RF-MEMS switchesProceedings paper