Electrical characterization of BEOL plasma-induced damage in bulk FinFET technology

Hiblot, GaspardGaspardHiblotSubirats, AlexandreAlexandreSubiratsLiu, YefanYefanLiuVan der Plas, GeertGeertVan der Plas2021-10-272021-10-2720191530-4388https://imec-publications.be/handle/20.500.12860/33158Electrical characterization of BEOL plasma-induced damage in bulk FinFET technologyJournal articlehttps://ieeexplore.ieee.org/document/8537789