Guralnik, BennyBennyGuralnikHansen, OleOleHansenHenrichsen, Henrik H.Henrik H.HenrichsenBeltran-Pitarch, BraulioBraulioBeltran-Pitarchosterberg, Frederik W.Frederik W.osterbergShiv, LiorLiorShivMarangoni, Thomas A.Thomas A.MarangoniStilling-Andersen, Andreas R.Andreas R.Stilling-AndersenCagliani, AlbertoAlbertoCaglianiHansen, Mikkel F.Mikkel F.HansenNielsen, Peter F.Peter F.NielsenOprins, HermanHermanOprinsVermeersch, BjornBjornVermeerschAdelmann, ChristophChristophAdelmannDutta, ShibeshShibeshDuttaBorup, Kasper A.Kasper A.BorupMihiretie, Besira M.Besira M.MihiretiePetersen, Dirch H.Dirch H.Petersen2022-04-252021-12-102022-04-082022-04-2520210034-6748WOS:000724641600001https://imec-publications.be/handle/20.500.12860/38598Journal article10.1063/5.0063998WOS:000724641600001MICRO 4-POINT PROBETHERMAL-CONDUCTIVITYRESISTIVITY MEASUREMENTSTEMPERATURE-COEFFICIENTSILICONFILMSMEDLINE:34598479