Shamiryan, DenisDenisShamiryanBaklanov, MikhaïlMikhaïlBaklanovYanovitskaya, Z.S.Z.S.YanovitskayaZverev, A.V.A.V.ZverevTokei, ZsoltZsoltTokeiIacopi, FrancescaFrancescaIacopiMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8130Evaluation of thin Ta(N) film integrity deposited on porous glassesJournal article