New methods and instrumentation for functional, yield and reliability testing of MEMS on device, chip and wafer level

De Wolf, IngridIngridDe WolfDe Coster, JeroenJeroenDe CosterCherman, VladimirVladimirChermanCzarnecki, PiotrPiotrCzarneckiKalicinski, StanislawStanislawKalicinskiVarela Pedreira, OlallaOlallaVarela PedreiraSangameswaran, SandeepSandeepSangameswaranVanstreels, KrisKrisVanstreels2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15193New methods and instrumentation for functional, yield and reliability testing of MEMS on device, chip and wafer levelProceedings paper