MacKenzie, M.M.MacKenzieCraven, A.J.A.J.CravenMcComb, D.W.D.W.McCombMcGilvery, C.M.C.M.McGilveryMcFadzean, S.S.McFadzeanDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14083EELS analyses of metal-inserted high-k dielectric stacksProceedings paper