On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers

Bodgan, JustinJustinBodganBrady-Boyd, AnitaAnitaBrady-BoydO'Connor, RobertRobertO'ConnorArmini, SilviaSilviaArminiSelvaraju, VenkateswaranVenkateswaranSelvarajuHughes, GregGregHughes2021-10-252021-10-2520180169-4332https://imec-publications.be/handle/20.500.12860/30270On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layersJournal articlehttp://www.sciencedirect.com/science/article/pii/S0169433217323437