Piezoresistivity and electrical properties of poly-SiGe deposited at CMOS-compatible temperatures

Gonzalez, PilarPilarGonzalezHaspeslagh, LucLucHaspeslaghSeveri, SimoneSimoneSeveriDe Meyer, KristinKristinDe MeyerWitvrouw, AnnAnnWitvrouw2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17167Piezoresistivity and electrical properties of poly-SiGe deposited at CMOS-compatible temperaturesProceedings paper