Vos, RitaRitaVosCornelissen, IngridIngridCornelissenMeuris, MarcMarcMeurisMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/4013To remove or not to remove a particle?Meeting abstract