Bogaerts, WimWimBogaertsWiaux, VincentVincentWiauxDumon, PieterPieterDumonTaillaert, DirkDirkTaillaertWouters, Johan M. D.Johan M. D.WoutersBeckx, StephanStephanBeckxVan Campenhout, J.J.Van CampenhoutLuyssaert, BertBertLuyssaertVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7234Large-scale production techniques for photonic nanostructuresProceedings paper