The influence of addition elements on the early resistance changes observed during electromigration testing of Al metal lines

De Ceuninck, WardWardDe CeuninckD'Haeger, V.V.D'HaegerVan Olmen, JanJanVan OlmenWitvrouw, AnnAnnWitvrouwMaex, KarenKarenMaexDe Schepper, LucLucDe SchepperDe Pauw, P.P.De PauwPergoot, A.A.Pergoot2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2485The influence of addition elements on the early resistance changes observed during electromigration testing of Al metal linesJournal article