Advances in low temperature processing of silicon nitride based dielectrics and their applications in surface passivation and integrated optical devices

Agnihotri, Om PrakashOm PrakashAgnihotriJain, SureshSureshJainPoortmans, JefJefPoortmansSzlufcik, JozefJozefSzlufcikBeaucarne, GuyGuyBeaucarneNijs, JohanJohanNijsMertens, RobertRobertMertens2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4061Advances in low temperature processing of silicon nitride based dielectrics and their applications in surface passivation and integrated optical devicesJournal article