Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective Deposition

Pasquali, MattiaMattiaPasqualiSergeant, StefanieStefanieSergeantConard, ThierryThierryConardSpampinato, ValentinaValentinaSpampinatoViva, AlessandroAlessandroVivaDe Gendt, StefanStefanDe GendtArmini, SilviaSilviaArmini2022-05-062021-11-022022-05-062022-05-062021-03-062637-6113WOS:000665655800021https://imec-publications.be/handle/20.500.12860/37809Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective DepositionJournal article10.1021/acsaelm.1c00219WOS:000665655800021PULSED-FORCE MODEarea-selective depositionself-assembled monolayeratomic force microscopytip-sample adhesion force