Generic platform for silicon photonics based on MEMS reconfigurable photonic integrated circuits

Khan, Muhammad UmarMuhammad UmarKhanAbasahl, BanafshehBanafshehAbasahlZand, ImanImanZandQuack, N.N.QuackGylfason, K.K.GylfasonJezzini, M.M.JezziniHwang, H.Y.H.Y.HwangPorcel, M.A.G.M.A.G.PorcelLerma Arce, C.C.Lerma ArceSaurav, KumarKumarSauravBogaerts, WimWimBogaerts2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33283Generic platform for silicon photonics based on MEMS reconfigurable photonic integrated circuitsMeeting abstract