Optimized microelens shape by reflow of multiple layers of photoresist: experimental data and lens shape calculations

Genoe, JanJanGenoeHeremans, PaulPaulHeremansKuijk, MaartenMaartenKuijkVounckx, RogerRogerVounckxBorghs, GustaafGustaafBorghs2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1893Optimized microelens shape by reflow of multiple layers of photoresist: experimental data and lens shape calculationsOral presentation