Khaled, AhmadAhmadKhaledKljucar, LukaLukaKljucarBrand, SebastianSebastianBrandKögel, MichaelMichaelKögelAertgeerts, R.R.AertgeertsNicasy, R.R.NicasyDe Wolf, IngridIngridDe Wolf2021-10-242021-10-2420170026-2714https://imec-publications.be/handle/20.500.12860/28663Study of GHz-SAM sensitivity to delamination in BEOL layersJournal articlehttp://www.sciencedirect.com/science/article/pii/S0026271417302639