Mechanical integrity of back-end-of-Line with Ru nanowires and airgaps

Zahedmanesh, HoumanHoumanZahedmaneshVanstreels, KrisKrisVanstreels2021-10-292021-10-2920200026-2714https://imec-publications.be/handle/20.500.12860/36390Mechanical integrity of back-end-of-Line with Ru nanowires and airgapsJournal article10.1016/j.microrel.2020.113700