Takahara, MotokiMotokiTakaharaFunasaki, SuguruSuguruFunasakiKudou, JyunJyunKudouTsunoda, IsaoIsaoTsunodaTakakura, KenichiroKenichiroTakakuraOhyama, HidenoriHidenoriOhyamaNakashima, ToshiyukiToshiyukiNakashimaShibuya, MutsuoMutsuoShibuyaMurakami, KatsuyaKatsuyaMurakamiSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-202021-10-2020120255-5476https://imec-publications.be/handle/20.500.12860/21580Improvement of the crystalline quality of β-Ga2O3 films by high-temperature annealingJournal article