Tutunjyan, NinaNinaTutunjyanSardo, StefanoStefanoSardoDe Vos, JoeriJoeriDe VosVan Huylenbroeck, StefaanStefaanVan HuylenbroeckJourdain, AnneAnneJourdainPeng, LanLanPengInoue, FumihiroFumihiroInoueRassoul, NouredineNouredineRassoulBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneMiller, AndyAndyMillerPiumi, DanieleDanielePiumi2021-10-262021-10-2620180167-9317https://imec-publications.be/handle/20.500.12860/31984Etch process modules development and integration in 3D-SOC applicationsJournal articlehttps://www.sciencedirect.com/science/article/pii/S0167931718301722