Evaluation and screening of different wet cleaning solutions on BEOL applications

Suhard, SamuelSamuelSuhardClaes, MartineMartineClaesLoh, JamesJamesLohVereecke, GuyGuyVereeckeDemuynck, StevenStevenDemuynckVereecke, BartBartVereeckeBeyer, GeraldGeraldBeyer2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16281Evaluation and screening of different wet cleaning solutions on BEOL applicationsMeeting abstract