Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability

Li, YunlongYunlongLiTokei, ZsoltZsoltTokeiRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroesenekenMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10781Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliabilityProceedings paper