Metal-organic framework ZIF-8 films as low- $j dielectrics for on-chip interconnects

Eslava, S.S.EslavaZhang, LipingLipingZhangEsconjauregui, S.S.EsconjaureguiYang, J.J.YangVanstreels, KrisKrisVanstreelsBaklanov, MikhaïlMikhaïlBaklanovSaiz, E.E.Saiz2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22318Metal-organic framework ZIF-8 films as low- $j dielectrics for on-chip interconnectsOral presentation