Area-selective deposition by a combination of organic film passivation and atomic layer deposition

Pasquali, MattiaMattiaPasqualiDe Gendt, StefanStefanDe GendtArmini, SilviaSilviaArmini2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33752Area-selective deposition by a combination of organic film passivation and atomic layer depositionProceedings paperhttp://ecst.ecsdl.org/content/92/3/25.abstract