Blanco, VictorVictorBlancoBekaert, JoostJoostBekaertMao, MingMingMaoKutrzeba Kotowska, BogumilaBogumilaKutrzeba KotowskaLariviere, StephaneStephaneLariviereCiofi, IvanIvanCiofiBaert, RogierRogierBaertKim, Ryan Ryoung hanRyan Ryoung hanKimGallagher, EmilyEmilyGallagherHendrickx, EricEricHendrickxTan, Ling EeLing EeTanGillijns, WernerWernerGillijnsTrivkovic, DarkoDarkoTrivkovicLeray, PhilippePhilippeLerayHalder, SandipSandipHalderGallagher, MattMattGallagherLazzarino, FredericFredericLazzarinoPaolillo, SaraSaraPaolilloWan, DannyDannyWanMallik, ArindamArindamMallikSherazi, YasserYasserSheraziMcIntyre, GregGregMcIntyreDusa, MirceaMirceaDusaRusu, PaulPaulRusuHollink, ThijsThijsHollinkFliervoet, TimonTimonFliervoetWittebrood, FrisoFrisoWittebrood2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27862Single exposure EUV patterning for BEOL metal layers on the imec iN7 platformProceedings paper10.1117/12.2258005